The cheapest and most versatile way to do this is with a micro-controller. Many PICs and the ST STM32F100 range (ARM Cortex) have timers that will do this easily. You could use a small FPGA/CPLD but might find that harder if you don't use them already. Either route will give you a single chip master oscillator and three phase output.
The processor will have other resources that might be useful in your design.
The cheapest and most versatile way to do this is with a micro-controller. Many PICs and the ST STM32F100 range (ARM Cortex) have timers that will do this easily. You could use a small FPGA/CPLD but might find that harder if you don't use them already. Either route will give you a single chip master oscillator and three phase output.
The processor will have other resources that might be useful in your design.