Then download Keithley Instrument's e-handbook "Ensuring the Accuracy of Nanoscale Electrical Measurements" at http://www.keithley.com/pr/087. It includes a really useful glossary of nanotech testing terms!
You might also like to check out a selection of nanotechnology seminars (starting from basic to advanced level) which are all available on one handy and free CD - http://www.keithley.com/pr/089.