Do you have a question on MEMS Sensors? Ask our Expert, Donna Sandfox

Hi Donna -

I'm designing a device that will have 40 force sensors in a roughly 3" x 4" surface of elastomer. The sensors need to be highly sensitive, so they can detect how hard a user is pushing, from feather light to pretty hard. We also need to take readings from the entire sensor suite at about 30-60Hz. Do you think making my own piezoresitors would be a viable option? I've had difficulty locating sources for Silicon and Germanium, and I'm not sure what type is best or if I could even make the sensors once I had the material.

Thanks!

David

Hello David,

I admire your ambition on starting from scratch on designing a sensor, though it may be more cost effective to search the marketplace for something already commercially available.  I don't have much experience with Force Sensors, so I'm going to redirect you to an article I found that may give you some ideas on where to start if you don't find what you're looking for.

http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=5734379

Regarding manufacturing, I don't know what equipment you have available to you, but there are several MEMS Fabrication companies (assuming you are interested in a MEMS based sensor solution) in existance that already have wafer fabrication equipment in place to service the market.  The MEMS Industry Group website has a listing. From the below link, search Foundry Services.  

http://www.memsindustrygroup.org./custom/buyers_guide/index.cfm

Best of Luck!

Donna

Thanks so much, Donna! I appreciate your help and guidance. The paper sensors are incredibly neat, and that gave me a good start at what to look for. I found these really cool sensors, too : http://www.instructables.com/id/Flexible-Fabric-Pressure-Sensor/#step1

I bought the materials and got them in one day and was able to make a modified version in under 5 minutes. I used duct tape instead of fabric on the outside, which eliminated the need for sewing. Works great! Low-noise, dirt cheap, easy to make, very sensitive, and the perfect range for my needs!

Thanks again!

David

Thanks so much, Donna! I appreciate your help and guidance. The paper sensors are incredibly neat, and that gave me a good start at what to look for. I found these really cool sensors, too : http://www.instructables.com/id/Flexible-Fabric-Pressure-Sensor/#step1

I bought the materials and got them in one day and was able to make a modified version in under 5 minutes. I used duct tape instead of fabric on the outside, which eliminated the need for sewing. Works great! Low-noise, dirt cheap, easy to make, very sensitive, and the perfect range for my needs!

Thanks again!

David